FSI FSI Mercury - 150mm C

FSI FSI Mercury -

Vintage: 1997
SN: 0107-0508-1197
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN process: clean, strip
Former BelGaN MES/ERP name: FSI4

Dimensions & weight estimates:
Mainframe dim (cm): 140 x 127 x 110
Mainframe weight (kg):
Bypack1 dim (cm): 73 x 88 x 195
Bypack1 weight (kg):
Bypack2 dim (cm): 56 x 127 x 90
Bypack2 weight (kg):
Bypack3 dim (cm): 56 x 105 x 90
Bypack3 weight (kg):
Bypack4 dim (cm): 40 x 65 x 195
Bypack4 weight (kg):

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool