Beschrijving
LAM Rainbow 4528XL - Plasma Etch
Wafersize: 200mm
Former BelGaN process: oxidepets
Former BelGaN MES/ERP name: LAM13
Dimensions & weight estimates:
Mainframe dim (cm): 111.8 x 137.2 x 167.5
Mainframe weight (kg): 788
Bypack1 dim (cm): 55.9 x 81.3 x 110.5
Bypack1 weight (kg): 135
Bypack2 dim (cm): 55.9 x 22.9 x 76.2
Bypack2 weight (kg): 120
Bypack3 dim (cm): 47.5 x 93 x 126
Bypack3 weight (kg): 226.8
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Wafersize: 200mm
Former BelGaN process: oxidepets
Former BelGaN MES/ERP name: LAM13
Dimensions & weight estimates:
Mainframe dim (cm): 111.8 x 137.2 x 167.5
Mainframe weight (kg): 788
Bypack1 dim (cm): 55.9 x 81.3 x 110.5
Bypack1 weight (kg): 135
Bypack2 dim (cm): 55.9 x 22.9 x 76.2
Bypack2 weight (kg): 120
Bypack3 dim (cm): 47.5 x 93 x 126
Bypack3 weight (kg): 226.8
Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.
semiconductor BelGaN waferfab fab fab2 mainframe equipment tool
Documenten
Bezoekdag(en)
Op afspraak
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Visiting days: on appointment between December 2nd and January 8th. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
België
Ophaaldag(en)
Op afspraak
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Pickup: before end of March. Schedule will be published after completion of the auction and will be dependent on number of tools bought, placement in the fab and timely payment. belgan.pickup@online-auctions.be
Westerring 15
9700 Oudenaarde
België