Applied Materials 5200 HDP Centura - 150mm CVD C

Applied Materials 5200 HDP Centura - CVD

Vintage: 2000
SN: 308123
Wafersize: 150mm
200mm convertible: Yes
Chambers/configuration: 2
Former BelGaN MES/ERP name: CENTURA10

Dimensions & weight estimates:
Mainframe dim (cm): 172.3 x 225.4 x 242
Mainframe weight (kg): 1500
Bypack1 dim (cm): 57 x 95 x 105
Bypack1 weight (kg):
Bypack2 dim (cm): 80 x 120 x 170
Bypack2 weight (kg):
Bypack3 dim (cm): 57 x 95 x 105
Bypack3 weight (kg):
Bypack4 dim (cm): 95 x 115 x 210
Bypack4 weight (kg):

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool