Applied Materials Endura PVD 5500 - 150mm Metal deposition C

Applied Materials Endura PVD 5500 - Metal deposition

Vintage: 1994
SN: 3527
Wafersize: 150mm
200mm convertible: Yes
Former BelGaN MES/ERP name: SPUTTER3

Dimensions & weight estimates:
Mainframe dim (cm): 127 x 96 x 89
Mainframe weight (kg): 3400
Bypack1 dim (cm): 53 x 44 x 94
Bypack1 weight (kg): 800
Bypack2 dim (cm): 62 x 56 x 77
Bypack2 weight (kg): 600
Bypack3 dim (cm): 62 x 56 x 77
Bypack3 weight (kg): 630
Bypack4 dim (cm): 52 x 34 x 36
Bypack4 weight (kg): 270
Bypack5 dim (cm): 38 x 38 x 47
Bypack5 weight (kg): 130
Bypack6 dim (cm): 96 x 48 x 72
Bypack6 weight (kg): 500

Don't forget to check upcoming auctions at later dates of the compatible spare parts and subfab components to this tool.


semiconductor BelGaN waferfab fab fab2 mainframe equipment tool